• Japanese
  • Chinese

Cleanroom Technologies

This section introduces our cleanroom technologies to provide the cutting-edge production environments for such fields as semiconductor, flat-panel display, precision machinery, and biotechnology.

Cleanroom Technologies:Our technology & service

Clean Diffuser

This technology achieves the required clean level at the optimal ventilation count.

Spacefine (Ultra-precise Temperature Control Chamber)

This technology provides a precise temperature control at the level of ±5/1,000°C.

Dry Room (Low-dew-point Manufacturing Room)

This dry room system meets your needs for researching pharmaceutical agents, chemical products, electronic parts, and precision devices as well as lithium battery assembly.

Microscopic Vibration Countermeasure

This technology optimally controls microscopic vibrations that affect the yields of products.

Clean Facility Construction

This technique enhances the cleanliness of each step in a process to deliver a clean environment on schedule.

Countermeasure against Molecular Contamination

Introducing our concept models of countermeasure against molecular contamination.

Quake-proofing of Cleanroom

Introducing our aseismic design for a cleanroom, including piping, ducts, and ceilings.

Direct Expansion HVAC

This technology makes it possible to achieve high control accuracy without a central heating facility.

Silencer System

Since importing a silencing technology in 1986, we have developed numerous silencing technologies.

Eco-Rac® (Heat Recovery System with No Cross-contamination)

This technology recovers waste heat from exhaust gases.

Energy Plant Optimal Control System

With optimized control based on simulations, this technology maximizes the impact of energy savings for Energy Plant systems.

Stratherm® System (Temperature-stratified-flow Heat Storage Tank)

This temperature-stratified-flow heat storage tank takes advantage of gaps in water density.

Super Stratherm · G (Ground-based Super-stratified-flow Water Heat Storage Tank)

This technology promotes energy equalization for Energy plants. Introducing our ground-based super-stratified-flow water heat storage tank.

Freecooling System

This system uses external not air a freezer to create cold water.

Unitizing Systems

This technique enables short-term construction through prefabrication.

Louvreme® (Vertical-type Waterproof Louver)

This is Vertical-type Waterproof Louver.

Page Top