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We perform real-time measurement, recording, and data processing of verification in order to reduce the time spent on verification and for highly precise performance checking.

[Measurement of cleanliness, temperature and humidity, and the direction of airflow]
Working together, the measuring instruments and PCs perform real-time measurement, recording, and data processing for verification of cleanliness, temperature and humidity, and airflow properties in a cleanroom, enabling more precise verification and reducing the time spent on verification.
Based on a verification plan, we conduct an accurate performance verification (commissioning) to responsibly deliver a cleanroom that meets your requirements.

| 1. | Cleanliness |
|---|---|
| 2. | Filter leakage |
| 3. | Temperature |
| 4. | Humidity |
| 5. | Discharged air speed and uniformity |
| 6. | Directivity of airflow |
| 7. | Room air pressure |
| 8. | Noises |
| 9. | Vibrations |
| 10. | Static electricity (resistance value and charge potential) |
| 11. | Intensity of magnetic field |
| 12. | Airborne chemical components |
| 13. | Chemical components adhering to wafers |
| 14. | Pure water |
| 15. | Compressed air |
| 16. | Illuminance |
The performance verification for an industrial cleanroom is conducted in a matter of principle, at three stages; As Built (at the completion of construction), At Rest (during the installation of manufacturing equipment), and Operational (during a normal operation). We determine which items should be verified at each stage based on the customer's needs and conditions, in order to offer the best plan.
This software is designed to ensure a precise verification on the cleanliness, temperature, humidity, and the airflow properties in a cleanroom, and to improve the workability of verification. The verification results can be checked immediately in the target cleanroom.