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Tastech (Validation System)

Highly Precise & Quick Verification of a Cleanroom

We perform real-time measurement, recording, and data processing of verification in order to reduce the time spent on verification and for highly precise performance checking.

Performance Verification Process Simplified with Tastech

Coordination of measurement system with personal computers

[Measurement of cleanliness, temperature and humidity, and the direction of airflow]
Working together, the measuring instruments and PCs perform real-time measurement, recording, and data processing for verification of cleanliness, temperature and humidity, and airflow properties in a cleanroom, enabling more precise verification and reducing the time spent on verification.

Performance verification for a cleanroom

Based on a verification plan, we conduct an accurate performance verification (commissioning) to responsibly deliver a cleanroom that meets your requirements.

Flow of Commissioning

Example Items for certification of Commissioning
1. Cleanliness
2. Filter leakage
3. Temperature
4. Humidity
5. Discharged air speed and uniformity
6. Directivity of airflow
7. Room air pressure
8. Noises
9. Vibrations
10. Static electricity (resistance value and charge potential)
11. Intensity of magnetic field
12. Airborne chemical components
13. Chemical components adhering to wafers
14. Pure water
15. Compressed air
16. Illuminance

The performance verification for an industrial cleanroom is conducted in a matter of principle, at three stages; As Built (at the completion of construction), At Rest (during the installation of manufacturing equipment), and Operational (during a normal operation). We determine which items should be verified at each stage based on the customer's needs and conditions, in order to offer the best plan.

Performance Verification Support System (TASSTECWIN®)

This software is designed to ensure a precise verification on the cleanliness, temperature, humidity, and the airflow properties in a cleanroom, and to improve the workability of verification. The verification results can be checked immediately in the target cleanroom.