Cleanroom Technologies

This section introduces our cleanroom technologies to provide the cutting-edge production environments for such fields as semiconductor, flat-panel display, precision machinery, and biotechnology.

Optimally-clean Air Quality	Quick Construction (Short-term Construction Technologies)
Chemical-free	Flexibility
Support for 24-hours/day, 365-days/year operation	Reduction of Environmental Loads
Production Support	Feasibility & Amenity

Optimally-clean Air Quality

This section introduces our clean environmental technologies most suitable for production lines.

Clean Diffuser This technology achieves the required clean level at the optimal ventilation count.	Spacefine (Ultra-precise Temperature Control Chamber) This technology provides a precise temperature control at the level of ±5/1,000°C.
De-Chemi Cooler^® (Sensible Heat Cooler with Airborne Chemical Removal Capability) This technology reduces water-soluble chemical components in a cleanroom.	Dry Room This technology achieves the ventilation dew-point temperature of -60°C
Static Electricity Countermeasure Introducing our measures to prevent products from failing due to static electricity.	Microscopic Vibration Countermeasure This technology optimally controls microscopic vibrations that affect the yields of products.
Silencer System Since the introduction of the first silencing technology, various silencing techniques have been developed.

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Quick Construction (Short-term Construction Technologies)

Our short-term construction contributes to the early launch of your production lines.

Speeding Up Design Works by Utilizing Network This technique speeds up a design work using a database and simulator.	Unitizing Systems This technique enables short-term construction through prefabrication.
Clean Facility Construction This technique enhances the cleanliness of each step in a process to deliver a clean environment on schedule.	Tastech (Validation System) Tastech shortens the process of capability validation.

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Chemical-free (Optimal Molecular Contamination Countermeasure Technologies)

This section introduces our countermeasures against chemical molecular contamination in a cleanroom.

Countermeasure against Molecular Contamination Introducing our concept models of countermeasure against molecular contamination.	De-Chemi Cooler^® (Sensible Heat Cooler with Airborne Chemical Removal Capability) (Optimally-clean Air Quality) This technology reduces water-soluble chemical components in a cleanroom.
Interior Finishing for Cleanrooms We propose solutions to meet your requirements in countermeasures against molecular contamination, cost, and construction period.

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Flexibility (Layout-free Cleanroom Technologies)

This section introduces our flexible technologies to support the upgrading of manufacturing system or changes to layouts.

Ballroom System Introducing our minienvironment system.	Reducing Impacts of Changes on Existing Systems (Quick Construction) Introducing our cleanroom facility construction method.
Facility Hot Standby This technology supports changes with the hot-standby operation with an inverter.

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Support for 24-hours/day, 365-days/year Operation (Non-stop Operation Technologies)

This section introduces our technologies and expertise to support 24-hours/day and 365-days/year operation of equipment in your production lines.

Quake-proofing of Cleanroom Introducing our aseismic design for a cleanroom, including piping, ducts, and ceilings.	Facility Hot Standby This technology supports changes with the hot-standby operation with an inverter.
Countermeasure against Momentary Power Failure This technology addresses a momentary power failure using means such as an inverter with a restart relay and non-stop capabilities.	Use of Direct-acting (Beltless) Fan This technique reduces the maintenance count.
Hot-replaceable Filter & Lighting These technologies reduce fluctuations with the inverter control.

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Reduction of Environmental Loads

This section introduces the technologies that contribute to CO2 reduction and energy saving.

Super Stratherm System (Temperature-stratified-flow Heat Storage Tank) This technology promotes energy saving for heat source plants. Introducing our temperature-stratified-flow heat storage tank.	Super Stratherm • G (Ground-based Super-stratified-flow Water Heat Storage Tank) This technology promotes energy saving for heat source plants. Introducing our ground-based super-stratified-flow water heat storage tank.
Heat Source Optimal Control System With optimized control based on simulations, this technology maximizes the impact of energy savings for heat source systems.	Freecooling This technology promotes energy saving for heat source plants. Using the coldness of outside air, it produces cold water for air conditioning.
Louvreme^® (Vertical-type Waterproof Louver) Here, we propose the promotion of energy saving devices for outside-air treatment equipment.	Eco-Rac^® (Heat Recovery System with No Cross-contamination) This technology recovers waste heat from exhaust gases.
RTO (Regenerative Deodorization System) (VOC Treatment & Odor Control System)

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Production Support (Improvement Support for Manufacturing Systems)

This section introduces our support system for the improvement of manufacturing systems.

Minienvironment System: (Flexibility)
Introducing our clean-space localization technology.

Spacefine (Ultra-precise Temperature Control Chamber): (Optimally-clean Air Quality)
This technology provides a precise temperature control at the level of ±5/1,000°C.

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Feasibility & Amenity (Improvement of Production Environments)

This section introduces the systems for improving production environments.

Spot Air-conditioning System (Proprietary & Special Technologies) This technology provides spot air conditioning for factories with large spaces.	High Roof Factory Air-conditioning System (Proprietary & Special Technologies) This is an air conditioning system for factories with large spaces.
Reciproll (countermeasure against oil mist) (Proprietary & Special Technologies) This is the automatic regeneration roll filter for oil mist.

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