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Countermeasure against Molecular Contamination
Cleanroom Planning, Construction, and Verification for Best Contamination Prevention
Based on our 10+ years of vast expertise, unique technologies, and proprietary databases, we provide AMC-proof cleanrooms that are fit just for your requirements.
* AMCs = Airborne Molecular Contaminants
Our Concept of Chemical Molecular Contamination Countermeasures
[Planning 
Construction Verification]
High-precision analysis of airborne chemical components for cleanrooms
To achieve a highly precise trace analysis of airborne chemical components in a completed cleanroom, it is necessary to minimize chemical contaminations due to human sampling intervention.
To address this challenge, we have developed a high-precision analytical system for airborne chemical components, which has been utilized to analyze airborne chemicals in a large number of cleanrooms. Our analytical system for airborne chemical components can analyze any cleanroom in the world.
Chemical components produced in cleanrooms
The airborne chemical contamination sources in a cleanroom include the construction materials of the room, staff members in the room, and process gases and chemical solutions. The following table lists the chemical components stemming from sources such as cleanroom construction materials.
| Generation Source | Generated Substance |
|---|---|
| Outside air | NOx, SOx, Na, Cl, and Ca |
| Prefilter and medium-performance filter (Non-cloth / Non-glass) | P (Ester Phosphate as a Flame-resistant Material) |
| HEPA & ULPA (Glass fiber), and thermally insulated, sound-deadening material | B, DBP, siloxane, toluene, xylene, benzenes - From a filter paper binder, hotmelt, and packing |
| Chemical filter | Acetic acid is generated by the reaction of PGMEA in a process solvent with the acidic function in a chemical filter for base component reduction |
| EPDM (Ethylene-propylene-diene Monomer) rubber packing | Paraffinic material |
| Resin coated metal plate (Cabinet of Air-conditioning Equipment, Coil fin, etc.) | Paraffin; In rare cases, large amounts of organic substances have been generated. |
| Soft resin sheet (Vinyl Chloride Curtains) | DBP, DOP, phenols, benzenes, and dozens of other substances |
| Wire coating material (Non-eco Cable) | Organic phosphorus, DOP (a plasticizer), and siloxane |
| Electric machinery | Siloxane, lacquer, and fats and oils for lubrication |
| Paint (Antistatic and Dustproof) | Various metallic ions, benzenes, and fats |
| Partition (Composite Board) | Ethanol, etc. (Verify the Temperature and Time of Baking) |
| Concrete | NH3 and Ca |
| Silicon caulking agent | Siloxane, aldehydes, benzenes, toluene, etc. |
| Antistatic material (Wall, Floor, and Cabinet of Manufacturing Equipment) | C, Na, NO2, Ca, Fe, K, Co, amines, sulfonic acid, etc. |
| Human | NH3, acetone, Na, and Cl |
| Shoes and cosmetics | Various organic substances |
| Steam for humidification | AMP (Added as Antiscales for Boilers) |
Amounts of organic substances generated from typical cleanroom materials
(Source: Taikisha's material database)
| Material Category | THC-based Generated Amount (µg/hour/m2, on a toluene basis) |
Note |
|---|---|---|
| Conductive soft vinyl chloride sheet | 8,600,000 - 3,800,000 | NG |
| Heat-retention and dew-proof materials | 630,000 - 2,200 | CA |
| Dustproof paint for walls | 580,000 - 1,700 | CA |
| Caulking compounds | 310,000 - ND | CA |
| Adhesive for vinyl chloride | 170,000 - | |
| Long vinyl chloride sheet for floor carpeting | 150,000 - 2,800 | CA |
| Dustproof paint for floors | 81,500 - 100 | CA |
| EPDM packing | 37,000 - 6,900 | |
| Butyl rubber packing | 29,000 - | |
| Wall panel composite board | 28,000 - ND | CA |
| Polyethylene sheet | 26,000 - 3,900 | |
| Resin-coated electric wire | 25,000 - 10,000 | |
| Anticorrosive paint for steel frames | 19,000 - 7,200 | |
| ULPA filter, PTFE filter paper | 11,000 - | |
| Low organic ULPA filter, glass filter paper | 6,000 - | |
| Resin-tiled access floor | 5,000 -1,000 | |
| Curing tape | 4,500 - | |
| Colored, baked, and metal-coated resin board | 4,300 - 260 | |
| Low-outgassing resin sheet | 3,900 - ND | CA |
| Filter grid | 2,500 - ND | CA |
| Aluminum air conditioner coil fins | 1,600 - ND | CA |
| Canvas duct (Vinyl Chloride, Vapor Deposition, PTFE, etc.) | 580 - 40 | |
| Acrylic board; Static charge prevention | 220 - | |
| Galvalume sheet steel | 56 - 25 | |
| VP joint | 30 - ND | |
| Hard vinyl chloride board; Static charge prevention (Four domestic companies) | All ND | |
| Hard polycarbonate board | All ND | |
| Hard PET board | All ND | |
| Low-outgassing wall cloth for cleanroom | All ND |
- * NG --
- Prohibited; A large amount of gas is generated, regardless of manufacturer and model.
- * CA --
- Attention needed in selection; The outgassing volume significantly varies, depending on manufacturer and model.
Aerial outgassing database: Characteristics of ion components
(Source: Taikisha's airborne chemical concentration database)
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