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Spacefine (Ultra-precise Temperature Control Chamber)
This technology provides a precise temperature control at the level of ±5/1,000°C.
For manufacturing systems that require high-performance positioning, such as semiconductor and liquid crystal exposure systems, and precision measurement systems such as an electronic balance, Spacefine, with a direct expansion coil and hot gas reignition, provides energy saving, low cost, and high precision solutions.
Structure of Ultra-precise Temperature Control Chamber (External View, Front & Main Chambers)
Example installations of a direct expansion spacefine unit
- As a precision temperature control chamber installed in semiconductor and LCD factories.
- As other manufacturing or testing rooms that require precision temperature control.
Adoption of a high-precision multi-loop controller
- Two point sensors cascade-control discharged air.
- Appropriate draft correction control based on installation environment.
Cleanliness: 0.1μm, Class 1
Low outgas materials reduce the concentration of chemicals in the chamber (ITRS-compliant).
Special thermal insulation panels are used.
Example Result of 12-hour Continuous Measurement
Optimally-clean Air Quality (Other technologies & services)
