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De-Chemi Cooler® (Sensible Heat Cooler with Airborne Chemical Removal Capability)
Temperature & Humidity Control / Optimal Countermeasure Technologies against Molecular Contamination
De-Chemi Cooler® removes airborne chemicals, while performing sensible heat cooling. (Introduced in the ISSM 2001)
It significantly reduces water-soluble chemical components generated in a cleanroom, such as ammonia. This system is based on gas-liquid contact but the it saves both space and cost while providing cooling without dehumidification, thus eliminating the need for dry coils.
Overview of De-Chemi Cooler®
Consistently collecting water-soluble chemical components, with an ammonia filtering efficiency of 80% or higher.
Removing indoor thermal loads without dehumidification. (Dry cleaning)
Space & cost saving, low maintenance
- No need for dry coils - space saving
- About 20% lower initial investment than traditional methods
- About 18% lower operating costs - Cost saving
- No need for replacement of filters - Low maintenance
At least 70% lower environmental loading CO2 emissions than chemical filters.
Example Installation of De-Chemi Cooler®
De-Chemi Cooler® is installed in the returning air or circulative shaft area under the floor, and does not require the replacement of filters, dramatically reducing maintenance (When using chemical filters, excessive maintenance is required, including the replacement of the filters mounted in FFU.)
Installing a compact-type De-Chemi Cooler® directly under manufacturing system which generates highly concentrated chemicals can be an effective way to locally enhance the overall filtering efficiency. Areas with a high concentration of chemicals, such as ammonia, can be effectively targeted and controlled in this method.
Optimally-clean Air Quality (Other technologies & services)
